Structural and phase states of tantalum coatings on a titanium nickelide substrate under magnetic deposition

Abstract

This work presents the results of studies of the structural-phase state of tantalum coatings obtained by magnetron deposition on substrates of titanium nickelide in the austenite-martensitic state. The temperature of the titanium nickelide substrates during the deposition of the coating did not exceed 100 ° C. The structural-phase state of the tantalum coatings was determined by X-ray diffraction at different stages of formation. It is shown that at the initial stage of deposition, two-phase coatings (α- and β-Ta) are formed. The synthesis of a Ta coating leads to an increase in the interplanar distance of the B2 austenite phase in the crystallographic direction (100). This is caused by the formation of microstresses upon interaction with incident Ta ions. The lattice parameters of the B19 'phase do not change during the deposition of a tantalum coating.